Automated Wafer Loading System
- Category: Precision Robotics
- Company: Nanoscale Design & Manufacturing Laboratory
- Project date: Spring 2016
- Language: LabVIEW
- Project URL: https://tinyurl.com/y6oe3e7x
In this project, I developed a low cost wafer handling robot. The robotics used for such purposes in the semiconductor industry are generally very expensive, so my team and I sought to develop one for under $1000 that could still acheive an accuracy goal on the order of microns. Using composite linear actuators and capacitance probes, the robot was able to acheive this.